Semiconductor Equipment Remove Residual Glue Wafer Cleaning Machine / Wafer Cleaner Batch Plasma Descum/Unique Wafer Residue Removal Mechanism

At Yatherm Scientific, we know that you deserve the best equipment for your laboratory and that’s why we announce our of our exceptional equipment, that is, Residual Glue Wafer Cleaning Machine/Wafer Cleaner Batch Plasma Descum, is manufactured for the removal of photoresist, glue, and organic residue from wafers after lithography and other semiconductor processes.

We crafted this with advanced plasma cleaning technology, this mechanism offers batch wafer cleaning with absolute accuracy, making sure that you get totally clean surfaces without any contaminations for defect-free semiconductor manufacturing.

 

Plasma Descum Technology

The built-in mechanism of this equipment consists of both vacuum plasma cleaning and atmospheric plasma activation to remove microscopic remains from wafer surfaces. Under the influence of high-voltage ionization of gases such as air or oxygen, plasma helps in breaking down the organic films and supports the activation of surfaces for stronger adhesion. This “plasma descum” process is extremely important after lithography, in this case, even if you have the smallest of the residual stuff, it can cause compromise etching, deposition, or bonding steps.

 

Batch Cleaning Efficiency

We specifically engineered this equipment for high throughput, this mechanism will provide you great supports in batch wafer cleaning, making it to enable multiple wafers to be to be processed at the same time. You will experience a real-time monitoring of air pressure, voltage, temperature, and power stability through the screen which makes sure that you have constant outcomes across all wafers.

Because of ultra-low temperature plasma (<50°C), it offers to 100% guarantee of no damage cleaning, and it will work for even very fragile substrates and hi-tech semiconductor materials.

 

Main Features 

● Residual Glue & Photoresist Removal with the help of a plasma descum.
● Vacuum + Atmospheric Plasma Cleaning that provides complete flexibility in the cleaning process.
● Batch Cleaning System that will provide next level effectiveness and throughput.

● Ultra-Low Temperature Plasma which makes sure that cleaning of sensitive wafers also happens in a safe manner.
● Smart Monitoring & Failure Alerts, so that the downtime is prevented and the stability in the process is well maintained.
● Compact, Industry-Ready Design which is most appropriate for R & D labs and wafer fabs.)

 

Applications

Semiconductor Wafer Lithography: Removal of descum and resist, mainly after the exposure and development processes are done.
FPD Displays & Glass Industry: For doing the cleaning effectively of the surfaces before bonding and lamination.
Microelectronics & PCB/FPC Fabrication: For the effective removal of resin residues, activation of the surfaces before the processes like soldering and dispensing is being conducted.
● Automotive Electronics & Connectors: For the enhancement of adhesion for assembly processes.
Battery & Energy Industry: For the cleansing of electrodes, shells, and components before coating and welding.

 

Why Must You Pick Yatherm Scientific?

Because it has the ability to remove glue and photoresist residuals while elevating the surface adhesion and cleanliness, Yatherm’s Wafer Cleaner Batch Plasma Descum, making sure you produce higher yields and reliability in semiconductor and electronics manufacturing. It is a perfect combination of batch effectiveness, plasma precision, and contamination-free outcomes, which makes it an excellent tool for wafer production lines.

So call us now and learn more about this phenomenal instrument!

 

Technical Specification – Wafer Cleaner
Model
YS-C1000
YS-C1000-MW
PLASMA source
RF
microwave
Power
1000w
1250w
Applicable scope
4~8 inch
4~8inch
Single processing slice count
4~6 inch=50 piece /8inch=25 piece
4~6 inch=50 piece/8 inch=25 piece
Appearance dimensions
1250x1630x1900mm
1250x1630x1900mm
System control
PC
PC
Automation level
Auto
Auto